Micro-heaters embedded in PDMS fabricated using dry peel-off process

Published 2014 View Full Article

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Title
Micro-heaters embedded in PDMS fabricated using dry peel-off process
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 121, Issue -, Pages 1-4
Publisher
Elsevier BV
Online
2014-03-02
DOI
10.1016/j.mee.2014.02.029

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