Micro-heaters embedded in PDMS fabricated using dry peel-off process

标题
Micro-heaters embedded in PDMS fabricated using dry peel-off process
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 121, Issue -, Pages 1-4
出版商
Elsevier BV
发表日期
2014-03-02
DOI
10.1016/j.mee.2014.02.029

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