The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM

Published 2013 View Full Article

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Title
The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 109, Issue -, Pages 318-321
Publisher
Elsevier BV
Online
2013-04-04
DOI
10.1016/j.mee.2013.03.147

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