The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM

标题
The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 109, Issue -, Pages 318-321
出版商
Elsevier BV
发表日期
2013-04-04
DOI
10.1016/j.mee.2013.03.147

向作者/读者发起求助以获取更多资源

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started