Nano-imprinting lithography of P(VDF–TrFE–CFE) for flexible freestanding MEMS devices

Title
Nano-imprinting lithography of P(VDF–TrFE–CFE) for flexible freestanding MEMS devices
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 100, Issue -, Pages 41-46
Publisher
Elsevier BV
Online
2012-08-10
DOI
10.1016/j.mee.2012.07.112

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