Nano-imprinting lithography of P(VDF–TrFE–CFE) for flexible freestanding MEMS devices

出版年份 2012 全文链接

标题

Nano-imprinting lithography of P(VDF–TrFE–CFE) for flexible freestanding MEMS devices

作者

关键词

-

出版物

MICROELECTRONIC ENGINEERING

Volume 100, Issue -, Pages 41-46

出版商

Elsevier BV

发表日期

2012-08-10

DOI

10.1016/j.mee.2012.07.112

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