Large area nanopatterning by combined anodic aluminum oxide and soft UV–NIL technologies for applications in biology

Published 2011 View Full Article

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Title
Large area nanopatterning by combined anodic aluminum oxide and soft UV–NIL technologies for applications in biology
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 2444-2446
Publisher
Elsevier BV
Online
2011-02-10
DOI
10.1016/j.mee.2011.02.013

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