期刊
MICROELECTRONIC ENGINEERING
卷 88, 期 8, 页码 2444-2446出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2011.02.013
关键词
Nanoporous alumina; Soft UV-NIL; PDMS stamp; Hexane; Viscosity
资金
- PRES UniverSud
Combining the nanoporous anodic aluminum oxide (AAO) technique with soft lithography constitutes a highly reproducible and quick method for large-area nanopatterning, with increasing potential for applications in biology. The AAO templates were used as master-molds to fabricate large areas (several square centimeters) of nanostructured and ordered tapered PDMS-bumps. The master-molds were filled using hexane-diluted PDMS of reduced viscosity compared to standard one. Viscosity evolution study for different current agent and hexane concentrations was achieved. The as-obtained stamps served subsequently to create large-area highly ordered nanostructured silicon substrates using UV assisted Nanoimprint Lithography (UV-NIL). (C) 2011 Elsevier B.V. All rights reserved.
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