Combining HRTEM–EELS nano-analysis with capacitance–voltage measurements to evaluate high-κ thin films deposited on Si and Ge as candidate for future gate dielectrics

Title
Combining HRTEM–EELS nano-analysis with capacitance–voltage measurements to evaluate high-κ thin films deposited on Si and Ge as candidate for future gate dielectrics
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 4, Pages 419-422
Publisher
Elsevier BV
Online
2010-10-11
DOI
10.1016/j.mee.2010.10.012

Ask authors/readers for more resources

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search