Combining HRTEM–EELS nano-analysis with capacitance–voltage measurements to evaluate high-κ thin films deposited on Si and Ge as candidate for future gate dielectrics

标题
Combining HRTEM–EELS nano-analysis with capacitance–voltage measurements to evaluate high-κ thin films deposited on Si and Ge as candidate for future gate dielectrics
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 88, Issue 4, Pages 419-422
出版商
Elsevier BV
发表日期
2010-10-11
DOI
10.1016/j.mee.2010.10.012

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