Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser

Published 2011 View Full Article

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Title
Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 9, Pages 2908-2912
Publisher
Elsevier BV
Online
2011-04-15
DOI
10.1016/j.mee.2011.03.023

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