Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser

出版年份 2011 全文链接

标题

Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser

作者

关键词

-

出版物

MICROELECTRONIC ENGINEERING

Volume 88, Issue 9, Pages 2908-2912

出版商

Elsevier BV

发表日期

2011-04-15

DOI

10.1016/j.mee.2011.03.023

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