Boehmite filled hybrid sol–gel system as directly writable hard etching mask for pattern transfer

Published 2011 View Full Article

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Title
Boehmite filled hybrid sol–gel system as directly writable hard etching mask for pattern transfer
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 1964-1967
Publisher
Elsevier BV
Online
2011-01-11
DOI
10.1016/j.mee.2011.01.012

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