Boehmite filled hybrid sol–gel system as directly writable hard etching mask for pattern transfer

标题
Boehmite filled hybrid sol–gel system as directly writable hard etching mask for pattern transfer
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 1964-1967
出版商
Elsevier BV
发表日期
2011-01-11
DOI
10.1016/j.mee.2011.01.012

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