A novel 3D nanolens for sub-wavelength focusing by self-aligned nanolithography

Title
A novel 3D nanolens for sub-wavelength focusing by self-aligned nanolithography
Authors
Keywords
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Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 1506-1508
Publisher
Elsevier BV
Online
2009-11-18
DOI
10.1016/j.mee.2009.11.064

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