A novel 3D nanolens for sub-wavelength focusing by self-aligned nanolithography

标题
A novel 3D nanolens for sub-wavelength focusing by self-aligned nanolithography
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 1506-1508
出版商
Elsevier BV
发表日期
2009-11-18
DOI
10.1016/j.mee.2009.11.064

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