Laser interference lithography for nanoscale structuring of materials: From laboratory to industry

Title
Laser interference lithography for nanoscale structuring of materials: From laboratory to industry
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 4-6, Pages 937-940
Publisher
Elsevier BV
Online
2008-12-26
DOI
10.1016/j.mee.2008.12.043

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