Laser interference lithography for nanoscale structuring of materials: From laboratory to industry

标题
Laser interference lithography for nanoscale structuring of materials: From laboratory to industry
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 86, Issue 4-6, Pages 937-940
出版商
Elsevier BV
发表日期
2008-12-26
DOI
10.1016/j.mee.2008.12.043

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