Imprinted polymer stamps for UV-NIL

Published 2009 View Full Article

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Title
Imprinted polymer stamps for UV-NIL
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 11, Pages 2293-2296
Publisher
Elsevier BV
Online
2009-05-05
DOI
10.1016/j.mee.2009.04.020

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