Imprinted polymer stamps for UV-NIL

标题
Imprinted polymer stamps for UV-NIL
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 86, Issue 11, Pages 2293-2296
出版商
Elsevier BV
发表日期
2009-05-05
DOI
10.1016/j.mee.2009.04.020

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