Performance improvement of flash memory using AlN as charge-trapping Layer

Published 2008 View Full Article

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Title
Performance improvement of flash memory using AlN as charge-trapping Layer
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 3, Pages 299-302
Publisher
Elsevier BV
Online
2008-10-28
DOI
10.1016/j.mee.2008.10.008

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