A novel fabrication process of MEMS devices on polyimide flexible substrates

Published 2007 View Full Article

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Title
A novel fabrication process of MEMS devices on polyimide flexible substrates
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 2, Pages 452-457
Publisher
Elsevier BV
Online
2007-08-28
DOI
10.1016/j.mee.2007.08.004

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