A novel fabrication process of MEMS devices on polyimide flexible substrates

标题
A novel fabrication process of MEMS devices on polyimide flexible substrates
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 85, Issue 2, Pages 452-457
出版商
Elsevier BV
发表日期
2007-08-28
DOI
10.1016/j.mee.2007.08.004

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