Optical interferometric approach for measuring the geometrical dimension and refractive index profiles of a double-sided polished undoped Si wafer

出版年份 2014 全文链接

标题

作者

关键词

出版物

MEASUREMENT SCIENCE and TECHNOLOGY

Volume 25, Issue 7, Pages 075202

出版商

IOP Publishing

发表日期

2014-05-14

DOI

10.1088/0957-0233/25/7/075202

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MEASUREMENT SCIENCE and TECHNOLOGY

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Protocol

Reagent

Reprint

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