Synchrotron radiation-based x-ray reflection and scattering techniques for dimensional nanometrology

Title
Synchrotron radiation-based x-ray reflection and scattering techniques for dimensional nanometrology
Authors
Keywords
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Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 22, Issue 9, Pages 094032
Publisher
IOP Publishing
Online
2011-08-09
DOI
10.1088/0957-0233/22/9/094032

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