Synchrotron radiation-based x-ray reflection and scattering techniques for dimensional nanometrology

标题
Synchrotron radiation-based x-ray reflection and scattering techniques for dimensional nanometrology
作者
关键词
-
出版物
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 22, Issue 9, Pages 094032
出版商
IOP Publishing
发表日期
2011-08-09
DOI
10.1088/0957-0233/22/9/094032

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