Piezoelectric MEMS sensors: state-of-the-art and perspectives

标题
Piezoelectric MEMS sensors: state-of-the-art and perspectives
作者
关键词
-
出版物
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 20, Issue 9, Pages 092001
出版商
IOP Publishing
发表日期
2009-07-25
DOI
10.1088/0957-0233/20/9/092001

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