Design of a large measurement-volume metrological atomic force microscope (AFM)

Published 2009 View Full Article

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Title
Design of a large measurement-volume metrological atomic force microscope (AFM)
Authors
Keywords
-
Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 20, Issue 8, Pages 084003
Publisher
IOP Publishing
Online
2009-07-01
DOI
10.1088/0957-0233/20/8/084003

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