Sub-micron resolution CT for failure analysis and process development

Published 2008 View Full Article

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Title
Sub-micron resolution CT for failure analysis and process development
Authors
Keywords
-
Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 19, Issue 9, Pages 094001
Publisher
IOP Publishing
Online
2008-07-25
DOI
10.1088/0957-0233/19/9/094001
References
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