Journal
MATERIALS TRANSACTIONS
Volume 51, Issue 2, Pages 214-218Publisher
JAPAN INST METALS
DOI: 10.2320/matertrans.MC200921
Keywords
density of states; scanning low energy electron microscopy; aluminum; very-low-energy scanning electron microscopy; electron band structure
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Reflection of very slow electrons from solid surfaces has been reported to be inversely proportional to the local density of electronic states coupled to the incident electron wave. The reflected electron flux at units of eV used as the image signal in a scanning electron microscope allows mapping of the local density of states at high spatial resolution. Good performance of the microscope at very low energies is enabled by introducing the beam-retarding immersion lens (the cathode lens) with a biased specimen serving as the cathode. Results of demonstration experiments on aluminum are provided. [doi:10.2320/matertrans.MC200921]
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