Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Published 2013 View Full Article

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Title
Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates
Authors
Keywords
-
Journal
MATERIALS LETTERS
Volume 106, Issue -, Pages 363-365
Publisher
Elsevier BV
Online
2013-05-24
DOI
10.1016/j.matlet.2013.05.063

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