Replacing diamond cutting tools with CBN for efficient nanometric cutting of silicon

Published 2011 View Full Article

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Title
Replacing diamond cutting tools with CBN for efficient nanometric cutting of silicon
Authors
Keywords
-
Journal
MATERIALS LETTERS
Volume 68, Issue -, Pages 507-509
Publisher
Elsevier BV
Online
2011-11-12
DOI
10.1016/j.matlet.2011.11.028

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