Epitaxial growth of ZnO films at extremely low temperature by atomic layer deposition with interrupted flow

出版年份 2010 全文链接

标题

作者

关键词

出版物

Volume 120, Issue 2-3, Pages 236-239

出版商

Elsevier BV

发表日期

2010-01-13

DOI

10.1016/j.matchemphys.2009.12.028

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