Closed Batch Initiated Chemical Vapor Deposition of Ultrathin, Functional, and Conformal Polymer Films

Published 2014 View Full Article

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Title
Closed Batch Initiated Chemical Vapor Deposition of Ultrathin, Functional, and Conformal Polymer Films
Authors
Keywords
-
Journal
LANGMUIR
Volume 30, Issue 16, Pages 4830-4837
Publisher
American Chemical Society (ACS)
Online
2014-04-08
DOI
10.1021/la500543d

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