Pattern Shape Control for Heat Treatment Purification of Electron-Beam-Induced Deposition of Gold from the Me2Au(acac) Precursor

Published 2012 View Full Article

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Title
Pattern Shape Control for Heat Treatment Purification of Electron-Beam-Induced Deposition of Gold from the Me2Au(acac) Precursor
Authors
Keywords
-
Journal
LANGMUIR
Volume 28, Issue 14, Pages 6185-6191
Publisher
American Chemical Society (ACS)
Online
2012-03-14
DOI
10.1021/la203599c

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