Oxidation of Fluorinated Amorphous Carbon (a-CFx) Films

Title
Oxidation of Fluorinated Amorphous Carbon (a-CFx) Films
Authors
Keywords
-
Journal
LANGMUIR
Volume 26, Issue 2, Pages 908-914
Publisher
American Chemical Society (ACS)
Online
2009-09-16
DOI
10.1021/la902375f

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