Understanding Pattern Collapse in Photolithography Process Due to Capillary Forces

Published 2010 View Full Article

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Title
Understanding Pattern Collapse in Photolithography Process Due to Capillary Forces
Authors
Keywords
-
Journal
LANGMUIR
Volume 26, Issue 16, Pages 13707-13714
Publisher
American Chemical Society (ACS)
Online
2010-07-20
DOI
10.1021/la101521k

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