ALD Growth Characteristics of ZnS Films Deposited from Organozinc and Hydrogen Sulfide Precursors

Title
ALD Growth Characteristics of ZnS Films Deposited from Organozinc and Hydrogen Sulfide Precursors
Authors
Keywords
-
Journal
LANGMUIR
Volume 26, Issue 14, Pages 11899-11906
Publisher
American Chemical Society (ACS)
Online
2010-06-17
DOI
10.1021/la101128w

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