Atomic Layer Deposition as Pore Diameter Adjustment Tool for Nanoporous Aluminum Oxide Injection Molding Masks

Published 2008 View Full Article

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Title
Atomic Layer Deposition as Pore Diameter Adjustment Tool for Nanoporous Aluminum Oxide Injection Molding Masks
Authors
Keywords
-
Journal
LANGMUIR
Volume 24, Issue 9, Pages 4473-4477
Publisher
American Chemical Society (ACS)
Online
2008-03-21
DOI
10.1021/la800285s

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