Laminar flow used as “liquid etch mask” in wet chemical etching to generate glass microstructures with an improved aspect ratio

Published 2009 View Full Article

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Title
Laminar flow used as “liquid etch mask” in wet chemical etching to generate glass microstructures with an improved aspect ratio
Authors
Keywords
-
Journal
LAB ON A CHIP
Volume 9, Issue 14, Pages 1994
Publisher
Royal Society of Chemistry (RSC)
Online
2009-05-26
DOI
10.1039/b904769g

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