期刊
LAB ON A CHIP
卷 9, 期 14, 页码 1994-1996出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/b904769g
关键词
-
类别
资金
- National Basic Research Program (973 Program) of China [2007CB714505]
- Ministry of Education of China [20080031012]
A new method of anisotropic etching an amorphous bulk material is proposed in this paper. Laminar flow is employed in this method to mask the flow of an etchant and is termed as liquid etch mask. Since this mask has the physical properties of a liquid, it brings several advantages that could not be achieved by any kind of other etch mask in the solid phase. As a consequence, the aspect ratio of the glass channel could be improved to similar to 1 while in an inexpensive and convenient manner.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据