Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography

标题
Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 5, Pages 1684
出版商
American Vacuum Society
发表日期
2008-10-14
DOI
10.1116/1.2966433

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