Surface plasmon assisted contact scheme nanoscale photolithography using an UV lamp

标题
Surface plasmon assisted contact scheme nanoscale photolithography using an UV lamp
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 1, Pages 227
出版商
American Vacuum Society
发表日期
2008-02-16
DOI
10.1116/1.2834688

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