Atmospheric pressure spatial atomic layer deposition web coating with in situ monitoring of film thickness

Published 2013 View Full Article

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Title
Atmospheric pressure spatial atomic layer deposition web coating with in situ monitoring of film thickness
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 1, Pages 01A130
Publisher
American Vacuum Society
Online
2013-12-28
DOI
10.1116/1.4850176

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