Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications

Published 2014 View Full Article

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Title
Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 5, Pages 051603
Publisher
American Vacuum Society
Online
2014-08-20
DOI
10.1116/1.4893428

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