Chemical bonding and defect states of LPCVD grown silicon-rich Si3N4 for quantum dot applications

Published 2014 View Full Article

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Title
Chemical bonding and defect states of LPCVD grown silicon-rich Si3N4 for quantum dot applications
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 2, Pages 021507
Publisher
American Vacuum Society
Online
2014-01-17
DOI
10.1116/1.4861338

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