Chemical bonding and defect states of LPCVD grown silicon-rich Si3N4 for quantum dot applications

标题
Chemical bonding and defect states of LPCVD grown silicon-rich Si3N4 for quantum dot applications
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 2, Pages 021507
出版商
American Vacuum Society
发表日期
2014-01-17
DOI
10.1116/1.4861338

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