Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition

Published 2013 View Full Article

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Title
Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 1, Pages 01A105
Publisher
American Vacuum Society
Online
2013-11-16
DOI
10.1116/1.4831751

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