Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition

标题
Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 1, Pages 01A105
出版商
American Vacuum Society
发表日期
2013-11-16
DOI
10.1116/1.4831751

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