Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma

Published 2013 View Full Article

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Title
Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 1, Pages 01A117
Publisher
American Vacuum Society
Online
2013-12-12
DOI
10.1116/1.4842675

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